NANOPOSITIONING
N° | Model | Brand | Type |
11 | P-363.3UD | Physik Instrumente | Nanopositioning Tool (vacuum conditions) |
Technical Data P-363.3UD | Cod. |
UM |
valore |
Note |
Close Loop Travel (axis Z) | CLT |
µ |
+-2,7 |
|
Close Loop Travel (axis X and axis Y) | CLT |
µ |
+-2,5 |
|
Close Loop Resolution | CLR |
nm |
0,1 |
|
tempo di spostamento con passo da 0,1 nm | msec |
2,0 |
||
tempo di spostamento con passo da 20 nm | msec |
2,4 |
||
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