|
||||||
Reactor LPPE |
||||||
REACTOR LPPE
| PRINCIPAL CHARACTERISTICS OF THE REACTOR: |
| Vacuum |
| Gas |
| Energy |
| - Roll to Roll |
| -Cooling for 1) Bias 2) Pump Turbomolecular 3) ICPsorse |
|
||||||
Reactor LPPE |
||||||
REACTOR LPPE
| PRINCIPAL CHARACTERISTICS OF THE REACTOR: |
| Vacuum |
| Gas |
| Energy |
| - Roll to Roll |
| -Cooling for 1) Bias 2) Pump Turbomolecular 3) ICPsorse |
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