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		LPPE Description		LPPE Scheme		Methods
		CVD - VPE - ALD - VPD				Types
		AcCVD	SaCVD		Other	Processes

OTHER PROCESSES:



LPPE - MoCVD
(Low Pressure Plasma Enhanced)
(Metalorganic Chemical Vapour Deposition)

This process is suitable for growing thin film on various supports. It realises polycrystalline or amorphous growth, starting from metalorganic precursors. The deposition is made in medium vacuum, the gas is in a viscous regime (Kn<0,01). In order to work with enough purity, before starting the MoCVD process, it is advised to make the degassing of the chamber in high vacuum with a turbo-pump. activation and polycrystalline or amorphous growth in medium vacuum (MV=10^-1mbar-->10^-3 mbar)

LPPE - MoVPE
(Low Pressure Plasma Enhanced)
(Metalorganic Vapour Phase Epitaxy)

LPPE - MoALD
(Low Pressure Plasma Enhanced)
(Metalorganic Atomic Layer Deposition)

1) to deposit an atomic layer from a precursor and to make the purge.
2) to deposit another atomic layer from another precursor and to make
the purge.....and so on....This system is also called cyclic deposition.

l'acronimo più comune è OVPD ma noi preferiamo chiamarlo OrVPD
With these processes materials are obtained whose surface characteristics are different from the bulk characteristics.

LPPE-OrVPD
(Low Pressure Plasma Enhanced)
(Organic Vapour Phase Deposition)

Chemical process of generation of polymers from monomers either in the volume or on the surface under substantial aid of plasma	Plasma Polymerization
Generation of lateral bonds between linear polymer molecules. This process is very common by deposition of polymers from plasma, since plasma is partially damaging the existing bonds in the linear polymers (by electron impact, radicals, UV, ...) and making them more susceptible for radicals or other dangling bonds. The consequence is, that the plasma polymerized films are not a collection of linear polymer molecules, but a complex 3D-network with different properties comparing with purely chemically synthesized species.	Cross-linking

LP-OrVPD
(Low Pressure)
(Organic Vapour Phase Deposition)

Chemical process of generation of polymers from monomers either in the volume or on the surface	Plasma Polymerization
Generation of lateral bonds between linear polymer molecules. The consequence is a polymerized film, being a collection of linear polymer molecules.	Cross-linking
CVD (chemical vapor deposition) from organic monomer vapor	Vaporization