Methods
Types
AcCVD
SaCVD
Other
 Processes
 

LPPE - SaCVD
(Low Pressure Plasma Enhanced)
(Saline Chemical Vapour Deposition)


With this project we try to make thin film deposition with the Type CVD starting from saline precursors SaCVD Process.
We have chosen to use TiCl4 as a precursor in order to produce TiO2.

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