LPPE Description
 Methods
Types
AcCVD
Other
 Processes
 


METHODS for the TYPE CVD

AP-CVD
Atmospheric Pressure Chemical Vapour Deposition
LP-CVD
Low Pressure Chemical Vapour Deposition
AP-CVD
Atmospheric Pressure

Chemical Vapour Deposition
APPE-CVD
Atmospheric Pressure
Plasma Enhanced
Chemical Vapour Deposition
LP-CVD
Low Pressure

Chemical Vapour Deposition
LPPE-CVD
Low Pressure
Plasma Enhanced
Chemical Vapour Deposition
We divide the type CVD in 4 METHODS. But the method we are studying is only the method LPPE (LPPE-CVD).

Note: PE = Plasma Enhanced: sometimes also mentioned as PA = Plasma Assisted


METHODS for the TYPE VPE

LP-VPE
Low Pressure Vapour Phase Epitaxy
LP-VPE
Low Pressure

Vapour Phase Epitaxy
LPPE-VPE
Low Pressure
Plasma Enhanced
Vapour Phase Epitaxy



METHODS for the TYPE ALD
LP-ALD
Low Pressure Atomic Layer Deposition
LP-ALD
Low Pressure

Atomic Layer Deposition
LPPE-ALD
Low Pressure
Plasma Enhanced
Atomic Layer Deposition

 

METHODS for the TYPE VPD
LP-VPD
Low Pressure Vapor Phase Deposition
LP-ALD
Low Pressure

Vapor Phase Deposition
LPPE-ALD
Low Pressure
Plasma Enhanced
Vapor Phase Deposition

 

 

 

The Comments-section below is meant to be a common tool for the scientific comunity.
We are very pleased to receive your comments, which can be additions or corrections referred to the above webpage.
Every page on our website has the possibility to insert comments.